Production Ready 3D Optical Profiler System
The ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers provide non-contact measurement and characterization of micro- and nano-scale features of many types of surfaces, ensuring quality control and process monitoring in your manufacturing environment.
Our industry-leading ZeGage Pro-series sets the standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers. Built on ZYGO’s proprietary CSI technology, the ZeGage Pro delivers innovative technologies to enable precise, reliable, simple, and confident surface metrology.
Exclusive capabilities include SureScan™ technology for vibration robust metrology, Part Finder, and Smart Setup for simplified part setup and optimized measurements. It’s never been simpler to measure a wide variety of surfaces and parts, quickly and easily.
Read more to see how the ZeGage™ Pro systems’ power, versatility, and value can benefit you.
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Powerful Performance
- Proprietary non-contact measurement technology is enhanced with SureScan™ technology for low sensitivity to vibration and easy placement anywhere within your facility.
- Quantitative surface metrology with nanometer-level precision provides superior gage capability.
- High resolution 1.9 million pixel image sensor provides fast areal measurements in seconds, for excellent surface detail and visualization.
- Fully-automated measurement sequences and field stitching enable high resolution inspection of large areas. (Requires optional motorized part stage.)
Versatility
- Measures a wide variety of surface materials and parameters, including 2D and 3D profiling of surface texture, form, step-height and more.
- Included Mx software provides comprehensive tools for surface data visualization, analysis and reporting.
- Expand the measurement range of your investment with accessories that include objective turrets, manual and motorized sample stages, and optional software modules for film topography profiling and 2D analysis using Cognex VisionPro®.
Productivity and Value
- Smart Setup technology reduces training time, and shortens part changeover by automating part finding, light setting, and scan configuration. Smart Setup usually results in a first data map within 1 minute of placing the sample under the objective.
- Cost-effective price-to-performance ratio compares favorably to alternative systems, including mechanical contact stylus profilers.
- Non-contact method means no consumable replacement costs to worry about.
- Compact, vibration-tolerant SureScan™ technology for easy integration anywhere in your facility.
Large Format Inspection
The Nexview™ 650 is a large format inspection tool optimized for automated measurement of injection molding tooling, PCBs, glass panels and other samples requiring an extended work volume up to 650 x 650 mm. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision.
OEM Systems
ZYGO has a proven track record of delivering precise, high-speed 3D optical profiler sensors to OEM manufacturers and system integrators for the most challenging applications. These configurable systems are ideally suited for integration into automated production systems for in-line measurement and process control.
Industrial Enclosure
Durable, ergonomic and compact, the Guardian™ industrial enclosure for ZYGO 3D Optical Profilers provides protection from harsh environments, isolating the metrology core from the surrounding environment while maintaining full performance and functionality.
Micro Lens Metrology
For complete characterization of discrete micro lenses and their alignment features, ZYGO’s Compass™ system provides full-surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology for small lenses and molds with sub-nanometer height precision.
Key Features of ZYGO 3D Optical Profilers
SmartSetup™ Technology
Exclusive SmartSetup™ technology helps get measurement data from your ZYGO optical profiler more quickly by automating set up and configuration tasks. SmartSetup™ locates the sample surface, sets the light level and scan length, and takes a measurement – typically within 1 minute.
SureScan™ Technology
Vibration-tolerant SureScan™ technology combines innovative hardware and software, enabling a ZeGage™ 3D optical profiler to make high-precision measurements virtually anywhere in your manufacturing facility, even on the shop floor, without the need for a vibration isolation system.
Optical Profiler Objectives
Profiler objectives determine the magnification, working distance, slope capability, and field of view of the profiler (but not Z-height resolution, which is constant). The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry.
Mx™ Software
ZYGO’s Mx™ software powers complete metrology system control & data analysis, including interactive 3D maps, quantitative topography data, intuitive navigation, & built-in SPC with statistics, control charting, and pass/fail limits.