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Nexview™ NX2 3D Optical Profiler

Designed for the most demanding applications, the Nexview™ NX2 3D optical profiler combines exceptional precision, advanced algorithms, application flexibility, and automation into a single package that represents ZYGO’s most advanced Coherence Scanning Interferometric (CSI) profiler.

The completely non-contact technology optimizes the return on investment by delivering sub-nanometer precision at all magnifications and measuring a wider range of surfaces faster and more precisely than other comparable technologies commercially available. With applications as varied as flatness, roughness and waviness, thin films, step heights and more on virtually any surface and material, Nexview NX2 truly is the no-compromise profiler.

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As the latest generation flagship, Nexview™ NX2 provides a wide range of differentiated features targeted at making users’ metrology better, faster, and more reliable:

  • Large-area 1.9 MP sensor with high sensitivity lets you see more in a single measurement
  • High-speed measurements take only seconds for improved productivity and process control
  • Automated part focus and setup minimizes operator variability and training while reducing the time to data
  • Gage capable performance through exceptional precision and repeatability for the most demanding production applications.
  • Vibration robust metrology with SureScan technology and built in isolation enables high quality metrology even in vibration-prone environments
  • SmartPSI™ technology for ultra-fast profiling of ultra-smooth surfaces
  • 2D and 3D correlation provides confidence in your measurements with results that comply to ISO 25178 and ISO 4287 standards.
  • Mx™ software for instrument control, analysis, and measurement automation
  • True Color imaging for enhanced visualization
  • Variable image zoom with three included zoom lenses lets users optimize the field of view and maximize instrument flexibility

The Only Profiler You Need

Nexview NX2 3D Optical Profiler System

You no longer have to select a profiler based on the type of surface you want to measure. The Nexview™ NX2 profiler measures topography of virtually any surface from a super polished optical surface with sub-Angstrom surface roughness, to steep machined angles up to 85 degrees. It does all this in 3D, without contact, and provides the best qualities of other profiling technologies (stylus, confocal, focus scanning) without their shortcomings.

Additional application modules for specific needs, such as measurement in the presence of transparent films, and 2D vision analysis, are available for customers that require these capabilities.

Automated Operation

The Nexview™ NX2 profiler is a fly-by-wire tool with no manual controls, so it can be fully automated with programmed sequences to measure multiple areas of a surface, multiple parts in a tray, or larger surfaces by stitching together multiple measurements into a single measurement.

Clean, Streamlined, Design

The Nexview NX2 profiler features a large work area with clear lines of sight to help make measurement setups and changeovers simple and quick.

Its automated 200 mm integrated measurement stage is the epitome of clean and efficient industrial design. It features an embedded ±4 degree high load tilt stage with parcentric correction – which makes aligning the measurement surface simple, even for featureless samples. 

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Nexview™ NX2
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3D Optical Profiler Accessory Guide
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3D Optical Profilers
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Nexview NX2
Specifications

Special Configurations

Large Format Inspection

The Nexview™ 650 is a large format inspection tool optimized for automated measurement of injection molding tooling, PCBs, glass panels and other samples requiring an extended work volume up to 650 x 650 mm. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision.

OEM Systems

ZYGO has a proven track record of delivering precise, high-speed 3D optical profiler sensors to OEM manufacturers and system integrators for the most challenging applications. These configurable systems are ideally suited for integration into automated production systems for in-line measurement and process control.

Industrial Enclosure

Durable, ergonomic and compact, the Guardian™ industrial enclosure for ZYGO 3D Optical Profilers provides protection from harsh environments, isolating the metrology core from the surrounding environment while maintaining full performance and functionality.

Micro Lens Metrology

For complete characterization of discrete micro lenses and their alignment features, ZYGO’s Compass™ system provides full-surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology for small lenses and molds with sub-nanometer height precision.

Key Features of ZYGO 3D Optical Profilers

SmartSetup™ Technology

Exclusive SmartSetup™ technology helps get measurement data from your ZYGO optical profiler more quickly by automating set up and configuration tasks. SmartSetup™ locates the sample surface, sets the light level and scan length, and takes a measurement – typically within 1 minute.

SureScan™ Technology

Vibration-tolerant SureScan™ technology combines innovative hardware and software, enabling a ZeGage™ 3D optical profiler to make high-precision measurements virtually anywhere in your manufacturing facility, even on the shop floor, without the need for a vibration isolation system.

Optical Profiler Objectives

Profiler objectives determine the magnification, working distance, slope capability, and field of view of the profiler (but not Z-height resolution, which is constant). The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry.

Mx™ Software

ZYGO’s Mx™ software powers complete metrology system control & data analysis, including interactive 3D maps, quantitative topography data, intuitive navigation, & built-in SPC with statistics, control charting, and pass/fail limits.